AMAT 0190-76050 RF Match Network Assembly
- Product Code: 0190-76050 RF
- Availability: In Stock
AMAT 0190-76050 RF Match Network Assembly
Part Number: 0190-76050 | Applied Materials RF Subsystem Component
Product Overview
The AMAT 0190-76050 is a high-performance RF Match Network Assembly designed for Applied Materials' semiconductor manufacturing equipment. This critical component provides precise impedance matching for radio frequency (RF) power delivery in plasma processing systems, ensuring optimal energy transfer and process stability in wafer fabrication applications.
Engineered to meet the stringent requirements of semiconductor production environments, this assembly delivers consistent performance under high-vacuum and high-temperature conditions, contributing to improved process yields and equipment uptime.
Key Specifications
- Frequency Range: 13.56 MHz (standard), 2 MHz - 60 MHz (configurable)
- Power Handling: Up to 3000 W continuous wave (CW)
- Impedance Matching Range: 5 - 500 Ω
- Operating Voltage: 24 VDC ±5%
- Control Interface: RS-485, Ethernet IP
- Operating Temperature: 10°C to 50°C
- Vacuum Compatibility: 1x10⁻⁹ Torr (ultra-high vacuum rated)
- Dimensions: 280mm × 180mm × 120mm (L×W×H)
- Weight: 8.5 kg
- Certifications: CE, UL, SEMI S2/S8 Compliant
Main Features
Advanced tuning algorithm ensures rapid and accurate impedance matching for stable plasma conditions.
Low insertion loss (<0.5 dB) maximizes RF power transfer efficiency and reduces energy consumption.
Integrated sensors provide continuous monitoring of voltage, current, and temperature for predictive maintenance.
Hermetically sealed components and ultra-high vacuum (UHV) compatible materials for semiconductor processing.
Typical Applications
The AMAT 0190-76050 RF Match Network Assembly is specifically designed for use in Applied Materials semiconductor processing tools: